Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator

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United States of America Patent

PATENT NO 10403482
APP PUB NO 20170294293A1
SERIAL NO

15635065

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Abstract

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Systems and methods for tuning an impedance matching network in a step-wise fashion for each state are described. By tuning the impedance matching network in a step-wise fashion for each state instead of directly achieving optimum values of a radio frequency (RF) for each state and directly achieving an optimal value of a combined variable capacitance for each state, processing of a wafer using the tuned optimal values becomes feasible.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fong, Andrew Pleasanton, US 32 147
Hopkins, David Newark, US 34 330
Howald, Arthur M Livermore, US 57 1775
Valcore,, Jr John C Fremont, US 89 1580

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