LASER BEAM MACHINE AND LASER BEAM MACHINING METHOD
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United States of America Patent
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Apr 5, 2017
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Apr 14, 2016
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Abstract
A laser beam machine includes a laser oscillator that emits a machining laser beam, an irradiation optical system that irradiates a workpiece with a machining laser beam, a laser array that has a plurality of laser elements disposed in an array and emits an illumination laser beam by output of the plurality of laser elements, an illumination optical system that illuminates the workpiece with the illumination laser beam emitted by the laser array, and an imaging unit that images the workpiece which is illuminated by the illumination optical system with the illumination laser beam.
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