MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator

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United States of America Patent

PATENT NO 10807859
APP PUB NO 20170297897A1
SERIAL NO

15642694

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Abstract

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Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post.

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Patent Owner(s)

  • FRAUNHOFER - GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duerr, Peter Dresden, DE 33 170
Friedrichs, Martin Dresden, DE 5 12
Kunze, Detlef Dresden, DE 5 29
Neudert, Andreas Dresden, DE 3 1

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