Oscillation frequency measuring system and method for a MEMS sensor

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United States of America Patent

PATENT NO 10479674
APP PUB NO 20170297910A1
SERIAL NO

15639203

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Abstract

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A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS INTERNATIONAL N VCHEMIN DU CHAMP-DES-FILLES 39 PLAN-LES-OUATES GENEVA 1228

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mazzillo, Massimo Cataldo Corato, IT 74 612
Nagy, Ferenc Catania, IT 10 24
Russo, Alfio Biancavilla, IT 17 30

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