RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING THE SAME
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United States of America Patent
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Apr 11, 2017
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Apr 15, 2016
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Abstract
An antenna having radio-frequency (RF) resonators with tunable capacitors. In one embodiment, the tunable capacitor for tuning an RF resonator comprises: a first substrate with a first electrode attached thereto; a second substrate with a second electrode attached thereto; and a membrane between the first and second electrodes, the membrane being movable between the first and second electrodes in order to change capacitance.
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