Imprint apparatus, imprint method, and method of manufacturing article
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United States of America Patent
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Nov 10, 2020
Grant Date -
Oct 26, 2017
app pub date -
Apr 20, 2017
filing date -
Apr 25, 2016
priority date (Note) -
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Abstract
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising a control unit configured to control a process of deforming the mold into a convex shape and bringing the mold and the imprint material into contact with each other, wherein the control unit determines, based on information indicating a relationship between a relative tilt between the mold and the substrate, and a moment which fluctuates the relative tilt at a time of contact between the mold and the imprint material, a target relative tilt such that a moment generated at the time of contact between the mold and the imprint material falls within an allowable range, and starts contact between the mold and the imprint material after setting the relative tilt to the target relative tilt.
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