SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES
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United States of America Patent
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Jan 26, 2017
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Apr 22, 2016
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Abstract
A method and apparatus for a heated substrate support pedestal is provided. In one embodiment, the heated substrate support pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body A stem is coupled to a bottom surface of the body. A plurality of heater elements, a top electrode and a shield electrode are disposed within the body. The top electrode is disposed adjacent a top surface of the body, while the shield electrode is disposed adjacent the bottom surface of the body. A conductive rod is disposed through the stem and is coupled to the top electrode.
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