Multi-refrigerator high speed cryopump

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United States of America Patent

PATENT NO 10632399
APP PUB NO 20170306939A1
SERIAL NO

15633100

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Importance

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Abstract

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A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.

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Patent Owner(s)

  • EDWARDS VACUUM LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bartlett, Allen J New London, US 50 618
Eacobacci,, Jr Michael J Dennisport, US 7 11
Syssoev, Sergei Townsend, US 12 195

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