Holding apparatus, measurement apparatus, and article manufacturing method

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United States of America Patent

PATENT NO 10359275
APP PUB NO 20170307364A1
SERIAL NO

15496169

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Abstract

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There is provided a holding apparatus for holding an optical element, that comprises: a positioning member configured to position first and second sides of the optical element adjacent to each other; a first elastic member supported by the positioning member and configured to apply a biasing force to a third side of the optical element opposite to the first side; and a second elastic member supported by the positioning member and configured to apply a biasing force to a fourth side of the optical element opposite to the second side, wherein the first and second elastic members are configured such that a difference between linear expansion amounts of the first elastic member and the optical element and a difference between linear expansion amounts of the second elastic member and the optical element are both not greater than a threshold.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koike, Kana Utsunomiya, JP 3 4

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