MEMS-based calorimeter, fabrication, and use thereof

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United States of America Patent

PATENT NO 10295490
APP PUB NO 20170307553A1
SERIAL NO

15495677

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Abstract

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A MEMS-based calorimeter includes a reference channel, a sample channel, and a thermopile configured to measure a temperature differential between the reference channel and a sample channel. The reference channel and the sample channel each include a passive mixer such as a splitting-and-recombination micromixer. The passive mixer can be formed by a first set of channels in a first layer and a second set of channels in a second layer. Methods for fabricating the MEMS-based calorimeter and methods of using the calorimeter to measure thermodynamic properties of chemical reactions are also provided.

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Patent Owner(s)

  • THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jia, Yuan New York, US 4 12
Lin, Qiao New York, US 41 294
Zhang, Zhixing New York, US 12 89

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