Device and method for forming same

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United States of America Patent

PATENT NO 10338057
APP PUB NO 20170307587A1
SERIAL NO

15508072

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.

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Patent Owner(s)

  • HITACHI LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takeda, Kenichi Tokyo, JP 148 1683
Yanagi, Itaru Tokyo, JP 34 157

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