Eco-efficiency characterization tool

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United States of America Patent

PATENT NO 10185313
APP PUB NO 20170308071A1
SERIAL NO

15134234

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Abstract

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A method for wafer point by point analysis includes receiving a selection of manufacturing equipment, utility use data, and utilization data. A water eco-efficiency characterization is calculated based on the utilization data and the utility use data. An emissions eco-efficiency characterization is calculated based on the utilization data and the utility use data. An electrical energy eco-efficiency characterization is calculated based on the utilization data and the utility use data. A combined eco-efficiency characterization is calculated based on the utilization data and water eco-efficiency characterization, emissions eco-efficiency characterization, and electrical energy eco-efficiency characterizations. The combined eco-efficiency characterization is provided for display by a graphical user interface.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Denome, Mark Robert Sunnyvale, US 2 1
Hsieh, Ching-Hong Saratoga, US 3 1
Kapadia, Somil Bangalore, IN 2 5
Kumar, Ashish Bangalore, IN 160 767
Thangamany, Vijai Bangalore, IN 2 1
Venugopal, Vijayakumar Berkeley, US 4 15

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