Devices and methods for forming cross coupled contacts
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United States of America Patent
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Apr 16, 2019
Grant Date -
Oct 26, 2017
app pub date -
Apr 22, 2016
filing date -
Apr 22, 2016
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Abstract
Semiconductor devices and methods of fabricating the semiconductor devices with cross coupled contacts using patterning for cross couple pick-up are disclosed. One method includes, for instance: obtaining an intermediate semiconductor device; performing a first lithography to pattern a first shape; performing a second lithography to pattern a second shape overlapping a portion of the first shape; processing the first shape and the second shape to form an isolation region at the overlap; and forming four regions separated by the isolation region. An intermediate semiconductor device is also disclosed.
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