Leakage resistant RRAM/MIM structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11005037
APP PUB NO 20170309816A1
SERIAL NO

15647579

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method of manufacturing an integrated circuit device. In the method, a plurality of contacts are formed over a substrate, and one or more bottom electrode layers are formed over the plurality of contacts. A first dielectric layer is formed such that a first base region of the first dielectric layer is in contact with the one or more bottom electrode layers and a second base region of the first dielectric layer is not in contact with the one or more bottom electrode layers. One or more top electrode layers are formed over the first dielectric layer. Patterning is then performed by etching through the one or more top electrode layers and by etching through the first dielectric layer to form a metal-insulator-metal structure. The patterning removes a portion of the second base region, but does not remove the first base region.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Ming Chyi Hsinchu, TW 136 447
Liu, Shih-Chang Alian Township, TW 305 2186
Tsai, Chia-Shiung Hsin-Chu, TW 505 6277
Tseng, Yuan-Tai Zhubei, TW 73 346

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Nov 11, 2024
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 11, 2028
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 11, 2032
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00