Bulk acoustic wave (BAW) resonator structure
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United States of America Patent
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Nov 13, 2018
Grant Date -
Oct 26, 2017
app pub date -
Apr 21, 2016
filing date -
Apr 21, 2016
priority date (Note) -
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Abstract
A bulk acoustic wave (BAW) resonator comprises: a first electrode; a second electrode comprising a plurality of sides, wherein at least one of the sides is a connection side; a piezoelectric layer disposed between the first and second electrodes, and an acoustic reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, wherein an overlap of the reflective element, the first electrode, the second electrode, and the piezoelectric layer defines an active area of the acoustic resonator; a bridge adjacent to a termination of the active area of the BAW resonator; and a discontinuity disposed in the bridge.
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