METHOD, SYSTEM, AND DEVICE FOR REMOVING HYDROGEN PEROXIDE OR HYDRAZINE FROM A PROCESS GAS STREAM
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United States of America Patent
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Apr 28, 2017
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Apr 28, 2016
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Abstract
Provided herein is a device for removing residual hydrogen peroxide or hydrazine from an effluent gas stream which includes a metal oxide scrubber material configured to react with residual process gases under increased temperatures. Also provided are systems and methods of using the same.
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