SUSCEPTOR
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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app pub date -
Jul 18, 2017
filing date -
Jun 2, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.
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