Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method

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United States of America Patent

PATENT NO 10209614
APP PUB NO 20170315439A1
SERIAL NO

15655932

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Abstract

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A conductive film coated substrate, including a conductive film formed thereon. In a relationship between a bearing area (%) and a bearing depth (nm) that are obtained by measuring, with an atomic force microscope, a region of 1 μm×1 μm of a surface of the conductive film, the surface of the conductive film satisfies a relationship that (BA70-BA30)/(BD70-BD30) is 15 or more and 260 or less (%/nm), and a maximum height (Rmax) is 1.3 nm or more and 15 nm or less.

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Patent Owner(s)

  • HOYA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamamoto, Kazuhiro Tokyo, JP 44 195
Usui, Yoichi Tokyo, JP 5 26

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