METHODS AND APPARATUS FOR PROCESSING ITEMS WITH VERTICALLY ORIENTED PROCESSING TOOLS IN A CLEAN SPACE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

15644474

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FLITSCH FREDERICK ANEW WINDSOR NY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Flitsch, Frederick A New Windsor, US 249 4677

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation