Apparatus and methods for depositing ALD films with enhanced chemical exchange

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United States of America Patent

PATENT NO 11015246
APP PUB NO 20170321325A1
SERIAL NO

15494835

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Abstract

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Gas injector units for processing chambers having one or more of scavenging ports, differential pressure ports and variable surfaces for variable injector to substrate gap distances are described. Gas distribution assemblies and processing chambers incorporating the gas injector units are also described.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sato, Tatsuya E San Jose, US 15 64

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