Ultrasonic transducer with a non-uniform membrane

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United States of America Patent

PATENT NO 10632500
APP PUB NO 20170326594A1
SERIAL NO

15469383

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Abstract

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A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.

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Patent Owner(s)

  • INVENSENSE, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Renata Melamud Palo Alto, US 18 328
Ng, Eldwin District 16, SG 6 278

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