Integrated sensory systems

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United States of America Patent

PATENT NO 10386173
APP PUB NO 20170328702A1
SERIAL NO

15355068

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Abstract

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This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The system uses Fabry-Perot Interferometer in conjunction with beam collimator, beam splitter, optical waveguide and a photodetector integrated. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Vossough, Kris Palo Alto, US 7 34
Yazdani, Farhang San Jose, US 24 761

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