Method of calibrating and using a measuring apparatus that performs measurements using a spectrum of light

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United States of America Patent

PATENT NO 9897486
SERIAL NO

15402751

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Abstract

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A method of calibrating a measuring apparatus includes determining apparatus parameters that have an influence on a measurement spectrum generated by the measuring apparatus, generating the measurement spectrum by exposing a measurement target on a sample to light generated by the measuring apparatus, calculating an error of the apparatus parameters by comparing the measurement spectrum to an ideal spectrum corresponding to the apparatus parameters, and calibrating the measuring apparatus based on the calculated error of the apparatus parameters.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Chang-Hoon Hwaseong-si, KR 39 301
Jo, Tae-Yong Hwaseong-si, KR 3 4
Kim, Jong-Jeong Hwaseong-si, KR 2 2
Lee, Young-Joo Hwaseong-si, KR 34 166

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