THERMAL INFRARED DETECTOR AND MANUFACTURING METHOD FOR THERMAL INFRARED DETECTOR
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United States of America Patent
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Nov 8, 2016
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May 13, 2016
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Abstract
In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.
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