LOW-WARPAGE CERAMIC CARRIER PLATE AND METHOD FOR PRODUCTION

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United States of America Patent

APP PUB NO 20170332491A1
SERIAL NO

15531361

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Abstract

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For a carrier plate, it is proposed to brace a first ceramic functional layer over a connecting layer (VS) with a ceramic stressing layer (SPS) in order to reduce the lateral sintering shrinkage. The functional layer (FS) and the stressing layer (SPS) are glass-free or have only a small glass content of less than 5 wt %, whereas the connecting layer (VS) comprises a glass component or is a glass layer.

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Patent Owner(s)

Patent OwnerAddress
EPCOS AG81669 MÜNCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DUDESEK, Pavol Bad Gams, AT 10 64
MIYAUCHI, Yasuharu Graz, AT 22 125
PAYR, Edmund Graz, AT 6 11
PUDMICH, Günther Köflach, AT 1 2

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