Precision alignment of the substrate coordinate system relative to the inkjet coordinate system

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United States of America Patent

PATENT NO 10717646
APP PUB NO 20170333940A1
SERIAL NO

15600070

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Abstract

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A method and alignment system for minimizing errors in the deposition of films of tailored thickness. A first position on a stage is identified for optimal placement of a downward looking microscope (DLM) and an upward looking microscope (ULM) when alignment marks on the DLM and ULM are aligned, where the DLM is attached to a bridge and the ULM is attached to the stage. A second position on the stage is identified when the ULM on the stage is aligned with the alignment marks on a metrology tool. A surface of a chucked substrate affixed to the stage is then measured. A map between a substrate coordinate system and a metrology coordinate system may then be obtained using the measured surface of the chucked substrate with the first and second positions.

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Patent Owner(s)

  • 501 BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Singhal, Shrawan Austin, US 24 240
Sreenivasan, Sidlgata V Austin, US 209 5382

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