Device including semiconductor substrate containing gallium nitride and method for producing the same

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United States of America Patent

PATENT NO 10378124
APP PUB NO 20170335488A1
SERIAL NO

15589016

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Abstract

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A device includes a semiconductor substrate containing gallium nitride and having a crystal face inclined from 0.05° to 15° inclusive with respect to the c-plane. The semiconductor substrate includes an irregular portion on the crystal face, and the contact angle of pure water having a specific resistance of 18 MΩ·cm or more on the surface of the irregular portion is 10° or less.

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Patent Owner(s)

  • PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujikane, Masaki Osaka, JP 49 178

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