Photonic device for ultraviolet and visible wavelength range

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United States of America Patent

PATENT NO 10151879
APP PUB NO 20170336562A1
SERIAL NO

15468583

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Abstract

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In one aspect, a photonic device includes a substrate layer comprising magnesium fluoride and an optical guiding layer disposed on the substrate layer. The optical guide layer includes silicon dioxide. The substrate layer and the optical guide layer are transparent at an ultraviolet and visible wavelength range. In another aspect, a method includes oxidizing silicon to form a silicon dioxide layer, bonding the silicon dioxide layer to magnesium fluoride, removing the silicon and performing lithography and etching of the silicon dioxide to form a photonic device.

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Patent Owner(s)

  • RAYTHEON BBN TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Soltani, Mohammad Belmont, US 20 54

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