Electro-optical device and electronic device
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United States of America Patent
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Nov 20, 2018
Grant Date -
Nov 23, 2017
app pub date -
May 2, 2017
filing date -
May 23, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
An electro-optical device includes a mirror being positioned above a surface of a substrate and modulating light, a torsion hinge being positioned between the mirror and the substrate, and supporting the mirror via a mirror support post such that the mirror is pivotable about an axis, and address electrodes being positioned between the mirror and the substrate, and supplying electrostatic forces between the address electrodes and the mirror. Each of the address electrodes includes a first address electrode that is positioned on a side of the axis in plan view, and a second address electrode that is positioned on the opposite side of the axis with respect to the first address electrode in plan view. The first address electrode and the second address electrode are driven independently of each other.
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