System and method for electrical behavior modeling in a 3D virtual fabrication environment

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United States of America Patent

PATENT NO 10762267
APP PUB NO 20170344683A1
SERIAL NO

15607989

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Abstract

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Modeling of electrical behavior during the virtual fabrication of a semiconductor device structure is discussed. Electrical behavior occurring in a designated region of a semiconductor device structure may be determined during the virtual fabrication process. For example, resistance or capacitance values may be determined within a modeling domain of interest.

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COVENTOR INC1000 CENTREGREEN WAY SUITE 200 CARY NC 27513

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allampalli, Vasanth Waltham, US 1 7
Fried, David M South Salem, US 72 3273
Greiner, Kenneth B Arlington, US 16 135
Kamon, Mattan Concord, US 6 138
Yan, Yiguang Watertown, US 2 7

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