Methods of fabrication of flexible micro-thermoelectric generators

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United States of America Patent

PATENT NO 10680155
APP PUB NO 20170345989A1
SERIAL NO

15596611

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Abstract

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A cross-plane flexible micro-TEG with hundreds of pairs of thermoelectric pillars formed via electroplating, microfabrication, and substrate transferring processes is provided herein. Typically, fabrication is conducted on a Si substrate, which can be easily realized by commercial production line. The fabricated micro-TEG transferred to the flexible layer from the Si substrate. Fabrication methods provided herein allow fabrication of main TEG components including bottom interconnectors, thermoelectric pillars, and top interconnectors by electroplating. Such flexible micro-TEGs provide high output power density due to high density of thermoelectric pillars and very low internal resistance of electroplated components. The flexible micro-TEG can achieve a power per unit area of 4.5 mW cm−2 at a temperature difference of ˜50 K, which is comparable to performance of flexible TEGs developed by screen printing. The power per unit weight of flexible TEGs described herein is as high as 60 mW g−1, which is advantageous for wearable applications.

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Patent Owner(s)

  • THE CHINESE UNIVERSITY OF HONG KONG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Xu, Dongyan Hong Kong, CN 4 4
Zhang, Wenhua Hong Kong, CN 75 2254

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