Chemical-mechanical processing slurry and methods for processing a nickel substrate surface

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United States of America Patent

PATENT NO 10792785
APP PUB NO 20170348820A1
SERIAL NO

15615591

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Abstract

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Described are slurry compositions useful in chemical-mechanical processing of a nickel layer of a substrate, wherein the slurry compositions contain abrasive particles that include silica particles that are cationically charged at a low pH.

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Patent Owner(s)

  • CABOT MICROELECTRONICS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zhang, Ke Singapore, SG 323 1707

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