Interference observation device

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United States of America Patent

PATENT NO 10209056
APP PUB NO 20170356735A1
SERIAL NO

15545356

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Abstract

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An interference observation apparatus includes a light source, a splitting beam splitter, a combining beam splitter, a beam splitter, a mirror, a beam splitter, a mirror, a piezo element, a stage, an imaging unit, an image acquisition unit, and a control unit. An interference optical system from the splitting beam splitter to the combining beam splitter forms a Mach-Zehnder interferometer. The mirror freely moves in a direction perpendicular to a reflecting surface of the mirror. The total number of times of respective reflections of first split light and second split light in the interference optical system is an even number.

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Patent Owner(s)

  • HAMAMATSU PHOTONICS K.K.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamada, Hidenao Hamamatsu, JP 21 12
Yamauchi, Toyohiko Hamamatsu, JP 30 85

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