Systems and methods for electrically testing electromigration in an electromigration test structure
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United States of America Patent
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Dec 25, 2018
Grant Date -
Dec 14, 2017
app pub date -
Jun 14, 2016
filing date -
Jun 14, 2016
priority date (Note) -
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Abstract
Systems and methods for electrically testing electromigration in an electromigration test structure are disclosed herein. The systems include a voltage control portion, a current control portion, and a current regulating structure. The systems further include an electric current detector, a first system connection, and a second system connection. The systems also include a voltage detector, and a controller. In some embodiments of the methods, a voltage control portion regulates a high-side signal electric current to maintain a voltage difference below a voltage setpoint while a current control portion maintains the high-side signal electric current below a threshold current value. In some embodiments of the methods, one of the voltage difference and a magnitude of the high-side signal electric current is selected as a primary control parameter while the other is selected as a compliant control parameter.
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