Aluminum apparatus with aluminum oxide layer and method for forming the same

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United States of America Patent

PATENT NO 10262839
APP PUB NO 20170358430A1
SERIAL NO

15182334

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Abstract

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In a method, an aluminum body is chemically treated with at least one of an alkaline solution and an acid solution. Anode-oxidization is performed on the chemically treated aluminum body to form an aluminum oxide layer. The aluminum oxide layer is treated with hot water at a temperature more than 75° C. or steam. The aluminum oxide layer after being treated with hot water or steam includes plural columnar grains, and an average width of the columnar grains is in a range from 10 nm to 100 nm.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Bing-Hung San-Xia Town, TW 33 180
Chiu, Ru-Chien Hsinchu, TW 4 3
Koai, Keith Kuang-Kuo Zhubei, TW 22 20

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