Probe head assemblies and probe systems for testing integrated circuit devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10120020
APP PUB NO 20170363681A1
SERIAL NO

15184374

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Probe head assemblies and probe systems for testing integrated circuit devices are disclosed herein. In one embodiment, the probe head assemblies include a contacting structure and a space transformer assembly. In another embodiment, the probe head assemblies include a contacting structure, a suspension system, a flex cable interface, and a space transformer including a space transformer body and a flex cable assembly. In another embodiment, the probe head assemblies include a contacting structure, a space transformer, and a planarization layer. In another embodiment, the probe head assemblies include a contacting structure, a space transformer, a suspension system, a platen, a printed circuit board, a first plurality of signal conductors configured to convey a first plurality of signals external to the space transformer, and a second plurality of signal conductors configured to convey a second plurality of signals via the space transformer. The probe systems include the probe head assemblies.

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Patent Owner(s)

  • FORMFACTOR BEAVERTON, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liew, Brandon Beaverton, US 6 9
Salmon, Jay Portland, US 3 70
Swart, Roy E Hillsboro, US 9 28

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