PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
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United States of America Patent
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Jun 28, 2016
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Jun 28, 2016
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Abstract
A method of inspecting patterns to-be-inspected having regular intervals, the same widths and heights by using an image of the patterns to-be-inspected is disclosed. The method includes the steps of: obtaining centroids, widths and heights of the patterns to-be-inspected from an image of the patterns to-be-inspected; obtaining regular intervals, a mean of widths and a mean of heights of the patterns to-be-inspected, as information of design data, from the centroids, the widths and the heights; and inspecting the patterns to-be-inspected by using the information of the design data and edges of the image of the patterns to-be-inspected.
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