Workpiece holder for a wet processing system
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United States of America Patent
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May 7, 2019
Grant Date -
Dec 28, 2017
app pub date -
Jun 27, 2016
filing date -
Jun 27, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Techniques herein provide a workpiece holder that can hold relatively flexible and thin workpieces for transport and electrochemical deposition while avoiding electroplating fluid wetting contacts or contact regions of a given workpiece. A workpiece holder frame holds a workpiece by gripping the workpiece on opposing sides of the workpiece. A flexure structure is used for clamping a given workpiece and for providing an electrical path for supplying a current to the workpiece. An elastomer covering provides sealing and insulation of the electrical flexure structure. The workpiece holder also provides tension to the workpiece to help hold the workpiece flat during processing. Each flexure structure can provide an independent electrical path to the workpiece surface.
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