Sacrificial grating coupler for testing v-grooved integrated circuits
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United States of America Patent
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Nov 20, 2018
Grant Date -
Jan 4, 2018
app pub date -
Jun 30, 2016
filing date -
Jun 30, 2016
priority date (Note) -
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Abstract
Embodiments are directed to a method of forming an optical coupler system. The method includes forming at least one waveguide over a substrate, and forming a sacrificial optical coupler in a first region over the substrate. The method further includes configuring the sacrificial optical coupler to couple optical signals to or from the at least one waveguide, and forming a v-groove in the first region over the substrate, wherein forming the v-groove includes removing the sacrificial optical coupler from the first region.
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