Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure
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United States of America Patent
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Oct 16, 2018
Grant Date -
Jan 4, 2018
app pub date -
Dec 2, 2016
filing date -
Jun 30, 2016
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Abstract
A micro-electro-mechanical device, wherein a platform is formed in a top substrate and is configured to turn through a rotation angle. The platform has a slit and faces a cavity. A plurality of integrated photodetectors is formed in a bottom substrate so as to detect the light through the slit and generate signals correlated to the light through the slit. The area of the slit varies with the rotation angle of the platform and causes diffraction, more or less marked as a function of the angle. The difference between the signals of two photodetectors arranged at different positions with respect to the slit yields the angle.
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