Stress control in magnetic inductor stacks

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United States of America Patent

PATENT NO 10811177
APP PUB NO 20180005741A1
SERIAL NO

15197866

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Abstract

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A magnetic laminating structure and process for preventing substrate bowing include a first magnetic layer, at least one additional magnetic layer, and a dielectric spacer disposed between the first and at least one additional magnetic layers. The magnetic layers are characterized by defined tensile strength. To balance the tensile strength of the magnetic layer, the dielectric layer is selected to provide compressive strength so as to counteract the tendency of the wafer to bow as a consequence of the tensile strength imparted by the magnetic layer(s).

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Patent Owner(s)

  • IBM CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deligianni, Hariklia Alpine, US 205 2199
Doris, Bruce B Hartsdale, US 796 13219
O'Sullivan, Eugene J Nyack, US 123 1616
Wang, Naigang Ossining, US 100 415

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