Importance

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Abstract

A scanning electron microscope including: an electron beam source for generating a primary electron beam; an electron optical system configured to direct the primary electron beam to a specimen while focusing and deflecting the primary electron beam; and an energy analyzing system capable of performing parallel detection of an energy spectrum of back-scattered electrons emitted from the specimen is disclosed. The energy analyzing system includes: a Wien filter configured to separate the back-scattered electrons from a beam axis and analyze energies of the back-scattered electrons; and an array detector configured to detect the back-scattered electrons that have passed through the Wien filter. The Wien filter includes a plurality of electromagnetic poles, center-side ends of the plurality of electromagnetic poles have tapered surfaces, respectively, and the tapered surfaces form an exit of the Wien filter through which the back-scattered electrons pass out.

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First Claim