Segmented edge protection shield

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10622218
APP PUB NO 20180005838A1
SERIAL NO

15707176

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Abstract

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A segmented edge protection shield for plasma dicing a wafer. The segmented edge protection shield includes an outer structure and a plurality of plasma shield edge segments. The outer structure defines an interior annular edge configured to correspond to the circumferential edge of the wafer. Each one of the plurality of plasma shield edge segments is defined by an inner edge and side edges. The inner edge is interior to and concentric to the annular edge of the outer structure. The side edges extend between the inner edge and the annular edge.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ehrentraut, Georg Villach, AT 21 80
Engelhardt, Manfred Villach-Landskron, AT 88 1030
Roesner, Michael Villach, AT 33 133

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