Contact array optimization for ESD devices

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United States of America Patent

PATENT NO 9865584
SERIAL NO

15344087

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Abstract

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A contact array optimization scheme for ESD devices. In one embodiment, contact apertures patterned through a pre-metal dielectric layer over active areas may be selectively modified in size, shape, placement and the like, to increase ESD protection performance, e.g., such as maximizing the transient current density, etc., in a standard ESD rating test.

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Patent Owner(s)

  • TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Kun Sichuan, CN 59 177
Lin, He Frisco, US 18 46
Springer, Lily Dallas, US 10 47
Strachan, Andy Santa Clara, US 28 172
Wang, Dening McKinney, US 13 71
Wu, Chao Sichuan, CN 119 334
Xue, Gang San Jose, US 29 196

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