Multi-chamber deposition equipment for solid free form fabrication

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United States of America Patent

PATENT NO 10738378
APP PUB NO 20180010237A1
SERIAL NO

15206163

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Abstract

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Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.

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Patent Owner(s)

Patent OwnerAddress
NORSK TITANIUM AS3514 HØNEFOSS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Forseth, Trond Ringerike, NO 10 56
Haugen, Jørgen Hole, NO 1 1
Ramsland, Arne Hole, NO 13 30
Steinsvik, Svein Hole, NO 4 11
Vigdal, Brede Tyristrand, NO 14 61

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