Fabry-Perot interference filter and light-detecting device

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United States of America Patent

PATENT NO 11054560
APP PUB NO 20180011232A1
SERIAL NO

15633863

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Importance

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Abstract

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A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.

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Patent Owner(s)

  • HAMAMATSU PHOTONICS K. K.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirose, Masaki Hamamatsu, JP 147 988
Kasahara, Takashi Hamamatsu, JP 116 642
Kawai, Toshimitsu Hamamatsu, JP 60 243
Oyama, Hiroki Hamamatsu, JP 84 577
Shibayama, Katsumi Hamamatsu, JP 285 2381
Teramachi, Yumi Hamamatsu, JP 23 141

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