Silica membrane and separation membrane filter

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United States of America Patent

PATENT NO 10486110
APP PUB NO 20180015427A1
SERIAL NO

15703066

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A silica membrane filter 10 includes a porous substrate 13 and a silica membrane 18 formed on the porous substrate 13, the silica membrane 18 having an aryl group. The silica membrane 18 has an atomic ratio Si/C, as determined by elemental analysis using energy-dispersive X-ray spectrometry (EDX), in the range of 0.2 to 15. The silica membrane 18 preferably has a thickness in the range of 30 nm to 300 nm and an X/Y, a ratio of an absorption intensity X of a Si—O—Si bond to an absorption intensity Y based on the aryl group in a Fourier transform infrared absorption spectrum (FT-IR), in the range of 5.0 to 200.

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Patent Owner(s)

  • NGK INSULATORS, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furukawa, Masahiro Nagoya, JP 54 395
Miura, Aya Nagoya, JP 21 6

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