CHIP AND METHOD OF MANUFACTURING CHIPS

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United States of America Patent

SERIAL NO

15213379

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Abstract

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A method of manufacturing chips from a semiconductor wafer having a plurality of streets on a front surface of the semiconductor wafer is provided. The method includes: forming a plurality of crack stopping structures on the semiconductor wafer at locations respectively aligned with intersections of the streets; irradiating a laser beam focused inside the semiconductor wafer along the streets to induce cracks; and breaking the irradiated semiconductor wafer along the cracks to the crack stopping structures, so as to separate the irradiated semiconductor wafer into the chips.

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Patent Owner(s)

Patent OwnerAddress
NANYA TECHNOLOGY CORPORATIONNO 98 NANLIN RD TAISHAN DIST NEW TAIPEI CITY 243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LIN, Po-Chun Changhua County, TW 71 106

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