Method for cleaning single crystal pulling apparatus, cleaning tool for use therein, and method for manufacturing single crystal

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United States of America Patent

PATENT NO 10000863
SERIAL NO

15544364

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method for cleaning a single crystal pulling apparatus according to the present invention includes preparing a dummy crucible that simulates a crucible and includes a dummy liquid surface simulating a liquid surface of material melt in the crucible and a first dummy ingot simulating a single crystal ingot in process of being pulled up from the liquid surface of the material melt, and supplying gas in a state in which the dummy crucible is installed in a decompressed chamber of the single crystal pulling apparatus to generate a flow of the gas affected by the dummy crucible and detach foreign substances adhering to a wall surface of the chamber or parts in the chamber.

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Patent Owner(s)

  • SUMCO CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okita, Kenji Tokyo, JP 18 258

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