Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof
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United States of America Patent
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Mar 2, 2021
Grant Date -
Jan 25, 2018
app pub date -
Jul 18, 2017
filing date -
Jul 25, 2016
priority date (Note) -
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Abstract
Disclosed are a cleaning solution mixing system, a tool and a method of operation thereof, including an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.
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